2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

Collection

IEL Online

Publisher

IEEE

Subject

Components, Circuits, Devices and Systems

Access From

2009-03-27

URL

https://ieeexplore.ieee.org/servlet/opac?punumber=4799071

issn

978-1-4244-2977-6

eissn

978-1-4244-2978-3