19th IEEE International Conference on Micro Electro Mechanical Systems

Collection

IEL Online

Publisher

IEEE

Subject

Components, Circuits, Devices and Systems

Access From

2007-04-30

URL

https://ieeexplore.ieee.org/servlet/opac?punumber=10836

issn

0-7803-9475-5

eissn

978-1-5090-9070-9